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semiconductor Semiconductor

Semiconductor

Wafer AOI Inspection Equipment

In the semiconductor manufacturing industry, wafer inspection equipment plays a critical role in improving product quality and production efficiency while reducing costs, ensuring product stability and traceability.

Demand for Semiconductor Subsystems

During the automation transformation to semiconductor AOI (Automated Optical Inspection) equipment, wafer inspection systems should have capabilities such as pre-alignment and wafer handling, including the wafer handling function of Wafer Robots and edge-finding operation of Wafer Aligners, to meet customer requirements.

wafer_aoi_inspection_equipment

* Click the product in the image to view detailed features.

s01_002s
rwse_b

RWSE Single-arm Wafer Robot
Features
  • Utilizes high-precision, high-rigidity Direct Drive Motor.
  • Achieves repeatability of ±0.1mm, has a small turning radius, and optimizes space usage.
  • Can be equipped with HIWIN's self-manufactured key components and developed software applications.
Advantages
  • Vertical integration of hardware and software, with HIWIN providing customers with complete solutions.
  • Customized assembly：Adaptable to specific platform requirements, including under-slung pick-and-place operations and customized end-effectors and forks.

wafer_aligner_b

Wafer Aligner
Features
  • Multi-axis control using HIWIN's self-manufactured key components.
  • Provides precise wafer centering and angle positioning functions.
Advantages
  • Accurate positioning and stable movement ensure precision and consistency of wafer processing.
  • Embedded controller design eliminates the need for additional controllers and wiring space.
  • Complies with the European Restriction of Hazardous Substances (RoHS2) directive, uses the lowest water pollution grade (WGK1) lubricant, and adopts eco-friendly packaging (NBSK).