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E Series Wafer Robot

Feature

Direct drive motor design, repeatability ±0.1mm, support non-radial pick and place functions, motor-driven flip module.

Repeatability
±0.1 mm
Z axis stroke
Max.500 mm
Payload
1-3 kg
Application
SemiconductorLEDLCDICAutomated optical inspection(AOI)Automation industry
Technical Support