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Vacuum Linear Motors

Feature

HIWIN vacuum linear motors provide a variety of models, considering the low outgassing rate of vacuum applications, and can be applied to high vacuum environments of 10-8 mbar. The exclusive magnetic shielding design can be customized to effectively avoid magnetic field interference, and ensure stability for Electron beam applications for semiconductors

Vacuum Level
10-6 Pa
Low velocity ripple
<1 %
Application
Wafer grindingCentrifugal cleaningCentrifugal dryingPVDCVDNanoscale wafer inspection
Technical Support