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Vacuum Direct Drive Motors

Feature

HIWIN's highly customized vacuum direct-drive motor is suitable for high vacuum environments of 10-8 mbar. Through special packaging technology, it achieves the best heat dissipation effect and can continuously output high torque even under vacuum systems.

Vacuum Level
10-6 Pa
Type of rotating structure
Internal rotary table
Application
Wafer grindingCentrifugal cleaningCentrifugal dryingPVDCVDNanoscale wafer inspection
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