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NPS Series Nano Precision Stage

Feature

NPS series stage employ high stiffness cross roller bearing, offers nanometer-level servo jitter and excellent accuracy and repeatability.

Straightness and flatness
± 1 µm
Pitch and yaw
± 5 arc-sec
Accuracy
± 1 µm
Application
Semiconductor metrologyLaser micro machining, marking, scribingSurface metrology
Technical Support