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Linear Motor XY Stages

Feature

XY-stages can be used in automation, laser processing, semiconductor industries, and with E-series drives, the productivity can be improved and equipment can be stabilized.

Accuracy
± 2 µm
Repeatability
±1 µm
Orthogonality
10 arc-sec
Application
Laser processingAutomation industrialPrinted circuit board (PCB)Automated optical inspection(AOI)
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