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Equipment Front End Module (EFEM)

Feature

Self-made key components with high precision, modularization, cleanliness and user-friendly software design. Fully follow the related safety regulations, includes SEMI S2.

Repeatability
±0.1 mm
Cleanliness
Class 1
Vibration
<0.5 G
Application
Semiconductor IndustryAutomated optical inspectionSolar power industryLED industryPCB industry
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