Industry Solution Semiconductor Industry

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Technical Support

Machine Tool

Automation

Semiconductor

IC Processing Machines

Semiconductor IC processing machines are crucial manufacturing equipment used to produce integrated circuits. These machines require extremely high precision and resolution to ensure that the fabricated chips meet the designed microstructures and dimensions. They feature complex automated control systems that can monitor and adjust process parameters in real-time to ensure consistency and quality in the manufacturing process.

High-precision and High-performance Component Requirements

Key components such as single-axis robots, direct-drive motors, and Drives ensure precision, stability, and efficiency in the manufacturing process. Single-axis robots are used for moving, positioning, and handling workpieces or tools, commonly employed in tasks such as wafer handling and workbench movement. Direct-drive motors, which operate without mechanical transmission devices, are used for precise positioning and motion control. Drives are used to control and drive various motors and motion systems, providing precise control of current and voltage to ensure smooth and accurate movement.

* Click the product in the image to view detailed features.

KK Series Single-Axis Robot

Features

Modular Design：Integrates the ball nut and linear blocks into a single unit.
High Precision and High Rigidity：Ensures stable movement and operation.
Space-Saving：Compact size, suitable for applications with limited space.
Dustproof Design：Enhances product durability and reliability.

Advantages

Easy Installation and Maintenance：Simple design makes installation and maintenance easier and faster.
High-Performance Characteristics：Combines high repeatability, high efficiency, and high reliability, ensuring long-term stable operation and production efficiency.

DMN Series Direct Drive Motor

Features

Uses a high-resolution incremental/absolute feedback system for precise position feedback.
Provides excellent rigidity between the motor and load.
Utilizes crossed roller bearings for high dynamic response, high torque output, and high-precision positioning capabilities.
Outer rotating platform design with low installation height and space-saving features.

Advantages

Most Compact Design：The most lightweight form factor.
Can Be Paired with Servo Drive Control: Delivers excellent acceleration and smooth motion.
Hollow Shaft Design：Increases system flexibility and versatility, suitable for various automation and mechanical integration needs.

E1 Series Drive

Features

Universal Design：Supports AC servo, linear, and direct-drive motors, meeting the application needs of various industry.
Smart auto-tuning function：Easily adapts to mechanisms with varying loads, allowing the machines to operate quickly and stably, effectively reducing setup time.

Advantages

Unique Gantry Control：Utilizes two E1 drives connected together, enabling gantry control for both linear and rotary motion, providing a cost-effective control and drive solution.